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A comparison of the composition of thin films on substrates determined by EDX and surface analysis

✍ Scribed by A. G. Fitzgerald; A. D. Gillies; H. L. L. Watton

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
406 KB
Volume
16
Category
Article
ISSN
0142-2421

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✦ Synopsis

Abstract

Single‐scattering Monte Carlo electron trajectory simulation has been implemented for the calculation of characteristic x‐ray production in thin films on substrates. The validity of the simulation has been verified by comparison with EDX results from various thicknesses of gold and silver films on silicon substrates over a range of electron energies. The simulation has been applied to binary thin films on substrates, and computational methods have been devised to eliminate the lengthy graphical techniques for film thickness and composition determination used previously. A comparison of calculated film compositions has been made with composition obtained by surface analytical techniques.

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Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
✍ Ranjana Saha; William D. Nix πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a