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Techniques for the compositional and chemical state analysis of surfaces and thin films

✍ Scribed by W. Reuter


Publisher
Elsevier Science
Year
1983
Weight
733 KB
Volume
218
Category
Article
ISSN
0167-5087

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After a discussion of several fundamental aspects connected with the mass spectrometry of sputter-removed particles for surface and thin-film analysis and a comparison between secondary neutral mass spectrometry (SNMS) and glow discharge mass spectrometry, novel instrumental developments in SNMS for