𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Inorganic mass spectrometry for surface and thin film analysis

✍ Scribed by Hans Oechsner

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
722 KB
Volume
283
Category
Article
ISSN
0003-2670

No coin nor oath required. For personal study only.

✦ Synopsis

After a discussion of several fundamental aspects connected with the mass spectrometry of sputter-removed particles for surface and thin-film analysis and a comparison between secondary neutral mass spectrometry (SNMS) and glow discharge mass spectrometry, novel instrumental developments in SNMS for the analysis of electrically insulating materials are described. Subsequently, the utilization of MCs+ molecular ions in secondary ion mass spectrometry (SIMS) is discussed. In both instances the instrumental and methodical progress is elucidated by appropriate examples of SNMS and SIMS depth profiling analysis of various dielectric and metal multi-layer structures, and of the application of HCs+ ions to hydrogen detection.

πŸ“œ SIMILAR VOLUMES

Evaluation of cure conditions for polyim
Evaluation of cure conditions for polyimide thin films by pyrolysis–mass spectrometry
✍ Eric T. Johnson πŸ“‚ Article πŸ“… 1992 πŸ› John Wiley and Sons 🌐 English βš– 522 KB

Films of a BTDA-mPDA-ODA polyimide copolymer (DuPont Pyralin PI-2555) were spincoated onto silicon wafers and cured at either 300 or 350Β°C. Films cured at each temperature were then analyzed by various pyrolysis mass spectrometric methods. Low-temperature pyrolysis mass spectrometry showed that poly