Evaluation of cure conditions for polyimide thin films by pyrolysis–mass spectrometry
✍ Scribed by Eric T. Johnson
- Publisher
- John Wiley and Sons
- Year
- 1992
- Tongue
- English
- Weight
- 522 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0021-8995
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✦ Synopsis
Films of a BTDA-mPDA-ODA polyimide copolymer (DuPont Pyralin PI-2555) were spincoated onto silicon wafers and cured at either 300 or 350°C. Films cured at each temperature were then analyzed by various pyrolysis mass spectrometric methods. Low-temperature pyrolysis mass spectrometry showed that polyimide films cured at the lower temperature contained more residual water and N-methyl pyrrolidone solvent than did the films cured at the higher temperature. High-temperature pyrolysis mass spectrometry of the two samples showed subtle differences in the mass spectrum of the polyimide pyrolysate under electron impact (EI ) ionization conditions. Principal components analysis was used to differentiate between the EI mass spectra of the high-and low-temperature cured films. Several pyrolysis products, primarily aromatic hydrocarbon and heterocyclic fragments, were separated and identified by gas chromatography/mass spectrometry.