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Combined processing of ellipsometric and photometric data to determine the optical constants and thicknesses of amorphous hydrogenated silicon layers

✍ Scribed by R. V. Aleshkin; S. M. Karabanov; D. I. Ponomarev


Book ID
110584142
Publisher
Springer US
Year
1994
Tongue
English
Weight
304 KB
Volume
61
Category
Article
ISSN
0021-9037

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