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Optical determination of the mass density of amorphous and microcrystalline silicon layers with different hydrogen contents

✍ Scribed by Z Remeš; M Vaněček; P Torres; U Kroll; A.H Mahan; R.S Crandall


Book ID
117148924
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
88 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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