✦ LIBER ✦

Collisional and chemically guided processes in low energy ion beam oxidation

✍ Scribed by SS Todorov; IR Chakarov; DS Karpuzov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Low energy ion beam oxidation of silicon

✍ S.S. Todorov; I.R. Chakarov; D.S. Karpuzov 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 617 KB

Developments in low energy electron beam

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