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Low energy ion beam oxidation of silicon surfaces: ballistics, diffusion and chemistry

✍ Scribed by S.S. Todorov; I.R. Chakarov; D.S. Karpuzov


Book ID
113282517
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
617 KB
Volume
65
Category
Article
ISSN
0168-583X

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