✦ LIBER ✦
Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
✍ Scribed by Lars Pastewka; Roland Salzer; Andreas Graff; Frank Altmann; Michael Moseler
- Book ID
- 108224594
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 1010 KB
- Volume
- 267
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.