Cold-Cathode ion source for sputtered neutral mass spectrometry of metals
β Scribed by D. L. Swingler
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 370 KB
- Volume
- 26
- Category
- Article
- ISSN
- 1076-5174
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β¦ Synopsis
A method involving cathodic sputtering and post-ionization in the electronflux of a Penning discharge is described for the analysis of metals.
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