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The study of amorphous and crystalline silicon thin films by sputter-ion source mass spectrometry

✍ Scribed by Charles Feldman; Frank G. Satkiewicz

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 223 KB
Volume: 12
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(72)90078-8

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