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Cohesive energy effects on the atomic transport induced by ion beam mixing

✍ Scribed by G.S. Chang; S.M. Jung; J.H. Song; H.B. Kim; J.J. Woo; D.H. Byun; C.N. Whang

Book ID: 114168303
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 661 KB
Volume: 121
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00375-8

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## Abstract Ion beam mixing was used to improve the adhesion between deposited Cu film (400 Å) and polyimide (PI) substrate. Ar^+^ ion with the energy levels between 180 and 200 keV, and the dose between 10^14^ to 4 × 10^16^ ions/cm^2^ were used. The surface analyses were carried out by Rutherford