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Cobalt-induced polycrystalline silicon film growth

✍ Scribed by Joondong Kim; Alan M. Piwowar; Richard Nowak; Joseph A. Gradella Jr.; Wayne A. Anderson

Book ID: 103818461
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 479 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.06.047

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