✦ LIBER ✦

Coaxial-line type microwave plasma CVD system to fabricate SiN films

✍ Scribed by Isamu Kato; Yusuke Kohyama; Kazuto Noguchi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of SiN films at low temperat

✍ Yoshinori Morita; Isamu Kato; Tatsuji Nakajima 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 641 KB

Fabrication of a–Si:H films by coaxial l

✍ Isamu Kato; Tetsuya Ueda; Kazuhisa Hatanaka 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 869 KB

Fabrication of sin thin films by rf bias

✍ Naomi Itoh; Kiyotaka Kato; Isamu Kato 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 387 KB

Preparation of silicon nitride films at

✍ Kato, Isamu; Noguchi, Kazuto; Numada, Kouji 📂 Article 📅 1987 🏛 American Institute of Physics 🌐 English ⚖ 765 KB

Quality of a-Si:H/Si3N4 multilayer films

✍ Isamu Kato; Masahiko Sagisaka; Takayoshi Sugai; Takeshi Kamigaichi 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 261 KB 👁 1 views