✦ LIBER ✦
Quality of a-Si:H/Si3N4 multilayer films fabricated by double tubed coaxial line type MPCVD system and application of the films to optical circuit element
✍ Scribed by Isamu Kato; Masahiko Sagisaka; Takayoshi Sugai; Takeshi Kamigaichi
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 261 KB
- Volume
- 84
- Category
- Article
- ISSN
- 8756-663X
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