✦ LIBER ✦
Preparation of silicon nitride films at room temperature using double-tubed coaxial line-type microwave plasma chemical vapor deposition system
✍ Scribed by Kato, Isamu; Noguchi, Kazuto; Numada, Kouji
- Book ID
- 121361747
- Publisher
- American Institute of Physics
- Year
- 1987
- Tongue
- English
- Weight
- 765 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.339772
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