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Clustering equilibrium and deactivation kinetics in arsenic doped silicon

✍ Scribed by Nobili, D.; Solmi, S.; Shao, J.

Book ID: 111950546
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 343 KB
Volume: 90
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1377607

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