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Evidence of atomic-scale arsenic clustering in highly doped silicon

✍ Scribed by Duguay, S.; Vurpillot, F.; Philippe, T.; Cadel, E.; Larde, R.; Deconihout, B.; Servanton, G.; Pantel, R.


Book ID
115481160
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
738 KB
Volume
106
Category
Article
ISSN
0021-8979

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