✦ LIBER ✦

Cluster ion beam process technology

✍ Scribed by Isao Yamada; Jiro Matsuo; Noriaki Toyoda

Book ID: 114167188
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 510 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00857-7

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