✦ LIBER ✦

Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography

✍ Scribed by Jung, Gun-Young; Johnston-Halperin, Ezekiel; Wu, Wei; Yu, Zhaoning; Wang, Shih-Yuan; Tong, William M.; Li, Zhiyong; Green, Jonathan E.; Sheriff, Bonnie A.; Boukai, Akram; Bunimovich, Yuri; Heath, James R.; Williams, R. Stanley

Book ID: 126184910
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 414 KB
Volume: 6
Category: Article
ISSN: 1530-6984
DOI: 10.1021/nl052110f

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

One-kilobit cross-bar molecular memory c

One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography

✍ W. Wu; G.-Y. Jung; D.L. Olynick; J. Straznicky; Z. Li; X. Li; D.A.A. Ohlberg; Y. 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 565 KB

Fabrication of a 50 nm half-pitch wire g

Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography

✍ Ahn, Seh-Won; Lee, Ki-Dong; Kim, Jin-Sung; Kim, Sang Hoon; Park, Joo-Do; Lee, Sa 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 598 KB

Fabrication of a 34 × 34 Crossbar Struct

Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography

✍ Jung, G. Y.; Ganapathiappan, S.; Ohlberg, Douglas A. A.; Olynick, Deirdre L.; Ch 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 452 KB

58ânm half-pitch plastic wire-grid pol

58ânm half-pitch plastic wire-grid polarizer by nanoimprint lithography

✍ Chen, Lei; Wang, Jian Jim; Walters, Frank; Deng, Xuegong; Buonanno, Mike; Tai, S 📂 Article 📅 2007 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 930 KB

Fabrication of 5 nm linewidth and 14 nm

Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography

✍ M. D. Austin; H. Ge; W. Wu; M. Li; Z. Yu; D. Wasserman; S. A. Lyon; S. Y. Chou 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 720 KB

Improved Pattern Transfer in Nanoimprint

Improved Pattern Transfer in Nanoimprint Lithography at 30 nm Half-Pitch by Substrate−Surface Functionalization

✍ Jung, Gun-Young; Li, Zhiyong; Wu, Wei; Ganapathiappan, S.; Li, Xuema; Olynick, D 📂 Article 📅 2005 🏛 American Chemical Society 🌐 English ⚖ 312 KB