✦ LIBER ✦
Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography
✍ Scribed by Jung, G. Y.; Ganapathiappan, S.; Ohlberg, Douglas A. A.; Olynick, Deirdre L.; Chen, Y.; Tong, William M.; Williams, R. Stanley
- Book ID
- 125996235
- Publisher
- American Chemical Society
- Year
- 2004
- Tongue
- English
- Weight
- 452 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1530-6984
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