✦ LIBER ✦

ChemInform Abstract: Inductively Coupled Ar Plasma Damage in AlGaAs.

✍ Scribed by J. W. LEE; D. HAYS; C. R. ABERNATHY; S. J. PEARTON; W. S. HOBSON; C. CONSTANTINE

Book ID: 101858274
Publisher: John Wiley and Sons
Year: 2010
Weight: 25 KB
Volume: 28
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199752265

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Statistical mechanics of Ar2+ in an indu

Statistical mechanics of Ar2+ in an inductively coupled plasma

✍ Timothy J. Cleland; Frank R. Meeks 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 299 KB

Charge transfer between Ar and Mg in an

Charge transfer between Ar and Mg in an inductively coupled plasma

✍ L.L. Burton; M.W. Blades 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 858 KB

Plasma-induced damage in PZT thin films

Plasma-induced damage in PZT thin films etched by inductively coupled plasma

✍ Myoung-Gu Kang; Kyoung-Tae Kim; Chang-Il Kim 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 340 KB

Etching mechanism of Bi4−xLaxTi3O12 film

Etching mechanism of Bi4−xLaxTi3O12 films in Ar/Cl2 inductively coupled plasma

✍ Dong-Pyo Kim; Kyoung-Tae Kim; Chang-Il Kim; A.M. Efremov 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 143 KB

Etching characteristics of Bi4−xLaxTi3O1

Etching characteristics of Bi4−xLaxTi3O12 (BLT) in inductively coupled CF4/Ar plasma

✍ Dong-Pyo Kim; Chang-Il Kim 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 215 KB

High density plasma etching of platinum

High density plasma etching of platinum films in BCl3/Ar and CF4/Ar inductively coupled plasmas

✍ Jong Cheon Park; Sungu Hwang; Jong-Man Kim; Jin Kon Kim; Eun-Hee Kim; Yeon-Gil J 📂 Article 📅 2009 🏛 The Korean Institute of Metals and Materials 🌐 English ⚖ 355 KB