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Statistical mechanics of Ar2+ in an inductively coupled plasma

✍ Scribed by Timothy J. Cleland; Frank R. Meeks

Book ID: 113375288
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 299 KB
Volume: 51
Category: Article
ISSN: 0584-8547
DOI: 10.1016/0584-8547(96)01530-3

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