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ChemInform Abstract: BNx: H Dielectric Layers Prepared by Electric Field-Assisted Plasma- Enhanced Chemical Vapor Deposition.

✍ Scribed by E. G. SAL'MAN; M. L. KOSINOVA; A. N. KORSHUNOV; A. M. BADALYAN; O. V. POLYAKOV; YU. M. RUMYANTSEV; N. P. SYSOEVA; H. I. FAINER

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