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Chemical vapour deposition of silicon nitride filaments from silicon subhydrides and ammonia

✍ Scribed by Britta Linner; Michael A. Guggenberger; Klaus J. Hüttinger; Hans-Joachim Kleebe


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
932 KB
Volume
16
Category
Article
ISSN
0955-2219

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