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Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings

✍ Scribed by P Lippens; A Segers; J Haemers; R De Gryse

Book ID
108389252
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
377 KB
Volume
317
Category
Article
ISSN
0040-6090

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