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Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings

✍ Scribed by Siegfried Hofmann

No coin nor oath required. For personal study only.

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The mechanical and tribological properti

✍ I. Efeoglu; R.D. Arnell; S.F. Tinston; D.G. Teer 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 414 KB

Influence of the Plasma Kinetics on the

✍ Sv. Statev; I. Ivanov; I. Petrov; J. Carlsson; V. Orlinov 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB