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Chemical etching of (100) GaAs in a sulphuric acid-hydrogen peroxide-water system

✍ Scribed by Irena Barycka; Irena Zubel

Publisher: Springer
Year: 1987
Tongue: English
Weight: 639 KB
Volume: 22
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf01233125

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