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Characterization of ultra-shallow p+ -n junctions formed by plasma doping with BF3 and N2 plasmas

✍ Scribed by S.B. Felch; B.S. Lee; S.L. Daryanani; D.F. Downey; R.J. Matyi

Book ID: 114194380
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 711 KB
Volume: 54
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00065-0

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