✦ LIBER ✦
Ultra shallow p+/n junction formation by plasma doping (PD) and long pulse all solid-state laser annealing (ASLA) with selective absorption modulation
✍ Scribed by C.G. Jin; Y. Sasaki; K. Okashita; H. Tamura; H. Ito; B. Mizuno; K. Tsutsui; S. Ohmi; H. Iwai
- Book ID
- 103860245
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 158 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0168-583X
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