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Characterization of Si nanocrystals into SiO2 matrix

✍ Scribed by C. Gravalidis; S. Logothetidis; N. Hatziaras; A. Laskarakis; I. Tsiaoussis; N. Frangis

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
751 KB
Volume
253
Category
Article
ISSN
0169-4332

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Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp