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Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

✍ Scribed by Nisha, M.; Saji, K. J.; Ajimsha, R. S.; Joshy, N. V.; Jayaraj, M. K.


Book ID
120599151
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
331 KB
Volume
99
Category
Article
ISSN
0021-8979

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