Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring

✍ Scribed by K. V. Rudenko; A. V. Myakon’kikh; A. A. Orlikovsky

• Book ID: 110214303
• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 294 KB
• Volume: 36
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1134/s1063739707030079