✦ LIBER ✦
Spectroscopic studies of fluorescent emission in plasma etching of Si and SiO2 and the mechanism of gas-surface interactions : D. Field, A. J. Hydes and D. F. Klemperer. Vacuum 34 (5), 563 (1984)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 255 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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