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Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis

โœ Scribed by Fuller, N C M; Malyshev, M V; Donnelly, V M; Herman, Irving P


Book ID
120623033
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
288 KB
Volume
9
Category
Article
ISSN
0963-0252

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