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Characterization of Oxide Precipitates in Heavily B-Doped Silicon by Infrared Spectroscopy

✍ Scribed by De Gryse, O.; Clauws, P.; Vanhellemont, J.; Lebedev, O. I.; Van Landuyt, J.; Simoen, E.; Claeys, C.

No coin nor oath required. For personal study only.

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