Ring‐distribution of oxygen precipitates in Czochralski silicon revealed by low‐temperature infrared absorption spectroscopy

✍ Scribed by Ono, Haruhiko; Ikarashi, Taeko

• Book ID: 118224125
• Publisher: American Institute of Physics
• Year: 1993
• Tongue: English
• Weight: 681 KB
• Volume: 63
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.110181