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Quantitative determination of high‐temperature oxygen microprecipitates in Czochralski silicon by micro‐Fourier transform infrared spectroscopy

✍ Scribed by Borghesi, A.; Geddo, M.; Pivac, B.; Sassella, A.; Stella, A.


Book ID
118141760
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
686 KB
Volume
58
Category
Article
ISSN
0003-6951

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