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Determination of Silicon Dioxide in Silicon Carbide by Photoacoustic Infrared Fourier Transform Spectrometry

✍ Scribed by Tsuge, Akira; Uwamino, Yoshinori; Ishizuka, Toshio


Book ID
115360726
Publisher
Society for Applied Spectroscopy
Year
1988
Tongue
English
Weight
322 KB
Volume
42
Category
Article
ISSN
0003-7028

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Ions produced by the 1064 nm Nd:YAG laser ablation of various Si-C samples include mixed silicon carbon (Si,C,,) cluster ions of low molecular mass. Unique Si,C, cluster ion distributions are observed. A charge state effect for Si,C, clusters is evident from differences between the respectively char