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Characterization of oxide layers grown on implanted silicon

✍ Scribed by G. Franco; V. Raineri; F. Frisina; E. Rimini

Book ID: 113284897
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 822 KB
Volume: 96
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)00463-3

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