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Characterization of metallic layer composites by means of AES/depth profile analysis

✍ Scribed by Bredendiek-K�mper, Susanne ;Jenett, Holger

Publisher
Springer-Verlag
Year
1992
Weight
433 KB
Volume
107
Category
Article
ISSN
0344-838X

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Thin titanium hydride (TiH y ) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiH y layers were prepared under UHV conditions by precisely controlled hydrogen sor