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Characterization of low-k porous silica films incorporated with alkylene groups

✍ Scribed by Y. Uchida; T. Katoh; M. Oikawa

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 198 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00084-7

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