✦ LIBER ✦
In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method
✍ Scribed by D. Fossati; C. Beitia; L. Plantier; G. Imbert; S. Passefort; M. Desbois; F. Volpi; J.-C. Royer
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 237 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4522
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