𝔖 Bobbio Scriptorium

✦ LIBER ✦

Characterization of ion beam etching induced defects in GaAs: Yoshihiko Yuba et al, J Vac Sci Technol, B6, 1988, 253–256

Book ID: 103468553
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 148 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90534-4

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