✦ LIBER ✦
4977. Ion-beam-induced-current (IBIC) monitoring of uniform and selective ion-etching processes in layered structures: H Sakaki et al, J Vac Sci Technol, 19 (1), 1981, 23–27
- Book ID
- 103464719
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 168 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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