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Characterization of homoepitaxial YBa2Cu3Ox films grown by metalorganic chemical vapor deposition

✍ Scribed by H. Zama; N. Tanaka; S. Koyama; T. Morishita


Book ID
108465942
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
216 KB
Volume
282-287
Category
Article
ISSN
0921-4534

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Low-temperature chemical vapor depositio
✍ Hideaki Zama; Shunri Oda; Takayuki Miyake; Takeo Hattori πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 197 KB

Low-temperature growth of YBa2Cu30 x films by CVD has been investigated using Y(DPM) 3, Ba(DPM)? and Cu(DPM) o as starting materials and N20 as an oxidizing agent. 123-perovskite structure ha~ been prepared at a substrate temperature of 530 C, Superconducting films with zero-resistivity T\_ of 15K