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Characterization of high-k gate dielectric films using SIMS

โœ Scribed by T. Yamamoto; N. Morita; N. Sugiyama; A. Karen; K. Okuno

Book ID
108417849
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
201 KB
Volume
203-204
Category
Article
ISSN
0169-4332

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