๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Characterization of e-beam evaporated hafnium oxide thin films on post thermal annealing

โœ Scribed by Ramzan, M.; Wasiq, M.F.; Rana, A.M.; Ali, S.; Nadeem, M.Y.

Book ID
120519055
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
989 KB
Volume
283
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Preparation of hafnium oxide thin film b
Preparation of hafnium oxide thin film by electron beam evaporation of hafnium incorporating a post thermal process
โœ Su Xing; Ninglin Zhang; Zhitang Song; Qinwo Shen; Chenlu Lin ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 152 KB

Electron beam evaporation was employed to deposit hafnium on silicon (100) substrate, followed by a rapid thermal oxidation process to fabricate hafnium dioxide thin film. Hafnium was transformed to hafnium oxide above a oxidizing temperature of 500 8C. An interfacial layer of hafnium silicate was o