Thin titanium oxide films deposited by e-beam evaporation with additional rapid thermal oxidation and annealing for ISFET applications

✍ Scribed by A.D. Barros; K.F. Albertin; J. Miyoshi; I. Doi; J.A. Diniz

• Book ID: 104052412
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 412 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.06.020