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Effects of different titanium sub-oxide on the properties of titanium dioxide thin films prepared by e-beam evaporation deposition with ion auxiliary

โœ Scribed by Guo Aiyun; Xue Yiyu; Zhu Xuanmin; Zhang Guangyong; Guo Peitao; Hu Xiaofeng


Publisher
Wuhan University of Technology
Year
2006
Tongue
English
Weight
426 KB
Volume
21
Category
Article
ISSN
1000-2413

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Effect of the deposition rate on ITO thi
โœ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1โ€“0.3โ€‰nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite